Work

Aerial imaging for FABs: productivity and yield aspects

Year: 2009

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.815419

Authors: Ilan Englard, Yaron Cohen, Yair Elblinger, Shay Attal, Neil Berns, Lior Shoval, Michael Ben-Yishai, Shmoolik Mangan

Institution: Applied Materials (Israel)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2048965867

FWCI: 0.469

Cites:

Cited by: 2

Related to: 10