Buffer layer effects on residual stress in InP on Si substrates
Year: 1989
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.101281
Authors: Mitsuru Sugo, Masafumi Yamaguchi
Institution: NTT (Japan)
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2051932224
