Work

Impact of extension implant energy purity and angle on the electrical characteristics of a 65nm device technology

Year: 2006

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2209988

Authors: Hans-Joachim L. Gossmann, Leonard Rubin, Tom Parrill, Aditya Agarwal

Institution: Axcelis Technologies (United States)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2052425809

FWCI: 0.984

Cites:

Cited by: 6

Related to: 10