Work

Growth of SiGe/Si superlattices on silicon-on-insulator substrates for multi-bridge channel field effect transistors

Year: 2005

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/j.jcrysgro.2005.05.068

Authors: J.M. Hartmann, P. Holliger, F. Laugier, G. Rolland, A. Suhm, T. Ernst, T. Billon, N. Vulliet

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Direction de la Recherche Technologique, STMicroelectronics (France)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2052594075

FWCI: 2.459

Cites: 21

Cited by: 28

Related to: 10