Year: 2011
Type: conference-paper
Abstract: We report on our investigation to precisely actuate diffractive micromirror arrays (MMA) with an accuracy of λ/100. The test samples consist of analog, torsional MEMS arrays with 65 536 (256x256) mirror elements. These light modulators were developed for structured illumination purposes to be applied as programmable mask for life science and semiconductor microscopy application. Main part of the work relies on the well known characterization of MEMS mirrors with profilometry to automatically measure and approximate the MMA actuation state with high resolution. Examples illustrate the potential of this strategy to control the tilt state of many thousand micromirrors within the accuracy range of the characterization tool. In a dynamic range between 0 and >250 nm the MMA deflection has been precisely adjusted for final MMA application in the deep-UV - VIS - NIR spectral range. The optical properties of calibrated MMAs are tested in a laser measurement setup. After MMA calibration an increased homogeneity and improved image contrast are demonstrated for various illumination patterns.
DOI: 10.1117/12.899881
Authors: Dirk Berndt, Jörg Heber, Steffen Sinning, Dirk Rudloff, Steffen Wolschke, Mark Eckert, Jan-Uwe Schmidt, Martin Bring, Michael Wagner, Hubert Lakner
Institution: Fraunhofer Institute for Photonic Microsystems
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2054586033