Work

Hidden-hinge micro-mirror arrays made by heterogeneous integration of two mono-crystalline silicon layers

Year: 2011

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2011.5734520

Authors: M. A. Lapisa, F. Zimmer, A. Gehner, G. Stemme, F. Niklaus

Institutions: KTH Royal Institute of Technology, Fraunhofer Institute for Photonic Microsystems

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2056424166

FWCI: 1.736

Cites: 2

Cited by: 7

Related to: 10