Work

Electron-optical design for the SCALPEL proof-of-concept tool

Year: 1995

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.221577

Authors: Warren K. Waskiewicz, Steven D. Berger, Lloyd R. Harriott, Masis M. Mkrtchyan, Stephen W. Bowler, J. M. Gibson

Institutions: AT&T (United States), University of Illinois Urbana-Champaign

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Advanced Research Projects Agency

OpenAlex ID: W2057444635

FWCI: 5.161

Cites: 9

Cited by: 16

Related to: 10