Work

Productivity improvements utilizing OptiScan, interlaced beam scanning, for Axcelis Purion XE implanter

Year: 2014

Type: conference-paper

Source: International Conference on Ion Implantation Technology

DOI: 10.1109/iit.2014.6940026

Authors: S. Satoh, R. Coolbaugh, C. Geary, J. Deluca

Institution: Axcelis Technologies (United States)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2063076830

FWCI: 1.714

Cites: 2

Cited by: 3

Related to: 10