Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
J. DeLuca
Observed names:
DeLuca, Jr, P M,
DeLuca, Jr., Paul M.,
J DeLuca,
J. Deluca
Institution:
Axcelis Technologies (United States)
Observed institution:
Axcelis Technologies (United States)
OpenAlex ID:
A5113513478
Aladdin upgrade design study: shielding
1985
·
W Swanson
, DeLuca, Jr, P M
, et al.
·
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)
·
10
PDF
Removal of High-Dose Ion-Implanted 248 nm Deep UV Photoresist Using UV Irradiation and Organic Solvent
2010
·
D. Tsvetanova
, R. Vos
, et al.
·
Journal of The Electrochemical Society
·
9
On the effects of heat treatment and surface orientation on corrosion and hydrogen ingress of Zr–2.5Nb pressure tube material
1999
·
Y.-P Lin
, J DeLuca
·
Journal of Nuclear Materials
·
7
Feasibility of the utilization of BNCT in the fast neutron therapy beam at Fermilab
2000
·
Katja Langen
, Arlene J. Lennox
, et al.
·
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)
·
4
Productivity improvements utilizing OptiScan, interlaced beam scanning, for Axcelis Purion XE implanter
2014
·
S. Satoh
, R. Coolbaugh
, et al.
·
International Conference on Ion Implantation Technology
·
3
Damage engineering on Purion XE™ high energy ion implanter
2014
·
J. DeLuca
, S. Satoh
, et al.
·
International Conference on Ion Implantation Technology
·
1
Optimization of cleanliness and oxidation in plasma doped photoresist strip
2012
·
J. DeLuca
, A. B. Lee
, et al.
·
AIP conference proceedings
·
1
Unusual SEM Image Contrast from Corrosion Oxide Films of Zr-2.5%Nb Pressure Tube Alloy
1997
·
Y P Lin
, J DeLuca
·
Microscopy and Microanalysis
·
1
Single implant damage accumulation and interactions between multiple implants
2022
·
J. DeLuca
, G. Cai
·
MRS Advances
FEP plug protects H2 masers
1980
·
J. DeLuca
, Victor S. Reinhardt
·
NASA Tech Briefs
Eutectic bonding of sapphire to sapphire
1973
·
J. DeLuca
·
NASA STI Repository (National Aeronautics and Space Administration)
PDF
Show more works
View as search
Works count:
11
Citation count:
36
H-index:
4
I10-index:
1
Year
Topic
Type