Work

Structure of aluminium oxide films deposited by d.c. reactive sputtering

Year: 1980

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(80)90418-6

Authors: B. Goranchev, V. Orlinov, F. Przyborowski, Chr. Weissmantel

Institutions: Bulgarian Academy of Sciences, Institute of Electronics

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2064023913

FWCI: 0.766

Cites: 6

Cited by: 11

Related to: 10