Author

V.I. Orlinov

Observed names: V Orlinov, V. ORLINOV, V. Orlinov

Institutions: Bulgarian Academy of Sciences, Institute of Electronics

Observed institutions: Bulgarian Academy of Sciences, Institute of Electronics

OpenAlex ID: A5079206753

Comparison of magnetron sputter deposition conditions in neon, argon, krypton, and xenon discharges

1993 · I. Petrov, I. Ivanov, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 70

Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System

1988 · I. Petrov, V. Orlinov, et al. · Contributions to Plasma Physics · 65

Highly oriented ZnO films obtained by d.c. reactive sputtering of a zinc target

1984 · I. Petrov, V. Orlinov, et al. · Thin Solid Films · 58

D.C. cathode sputtering: influence of the oxygen content in the gas flow on the discharge current

1976 · B. Goranchev, V. Orlinov, et al. · Thin Solid Films · 30

Electron energy distribution function in a dc magnetron sputtering discharge

1992 · I Ivanov, Sv Statev, et al. · Vacuum · 26

COmparison of Some Basic Plasma Parameters and Discharge Characteristics of Planar Magnetron Sputtering Discharges in Argon and Neon

1990 · I. Petrov, I. Ivanov, et al. · Contributions to Plasma Physics · 23

Direct current reactive sputtering of aluminium

1978 · B. Goranchev, V. Orlinov, et al. · Thin Solid Films · 16

Deposition of carbon films by bias magnetron sputtering in neon and argon

1990 · I. Petrov, I. Ivanov, et al. · Thin Solid Films · 13

Effect of ion bombardment during growth on the electrical resistivity of magnetron-sputtered carbon films

1989 · I. Petrov, V. Orlinov, et al. · Thin Solid Films · 13

Reactive ion etching of crystalline quartz for SAW devices

1989 · B Spangenberg, K Popova, et al. · Vacuum · 11

Influence of the Basic Process Parameters on the Ion/Atom Arrival Rate Ratio during Magnetron Sputter Deposition of Thin Carbon Films

1988 · I. Petrov, V. Orlinov, et al. · Contributions to Plasma Physics · 11

Structure of aluminium oxide films deposited by d.c. reactive sputtering

1980 · B. Goranchev, V. Orlinov, et al. · Thin Solid Films · 11

Evaluation and parametric modelling of abrasive wear resistance of ion-plated thin DLC films

1995 · I. Garnev, V. Orlinov · Diamond and Related Materials · 9

Angular distribution and sputtering yield of Al and Al2O3 during 40 key argon ion bombardment

1982 · V Orlinov, G Mladenov, et al. · Vacuum · 8

Mechanical stresses in D.C. reactively sputtered Fe2O3 thin films

1980 · V. Orlinov, G. Sarov · Thin Solid Films · 8

Dependence of cathode sputtering rate on the current in a glow discharge†

1969 · V. ORLINOV, G. MLADENOV · International Journal of Electronics · 6

D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks I: Deposition conditions and optical properties of the films

1980 · V. Orlinov, B. Goranchev, et al. · Thin Solid Films · 5

Influence of the heat transfer from the cathode on the dependence of cathode sputtering rate on current and pressure in a glow discharge†

1971 · V. ORLINOV, G. MLADENOV, et al. · International Journal of Electronics · 5

Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge†

1974 · V. ORLINOV, B. GORANCHEV, et al. · International Journal of Electronics · 4

Reactive ion etching of thin chromium films using a two-layer resist system of polyimide and evaporated silver halide

1986 · B. Spangenberg, V. Orlinov, et al. · Thin Solid Films · 3

Parametric modelling of crystalline quartz RIE in CF4/O2 plasma

1991 · K Popova, B Spangenberg, et al. · Vacuum · 2

Mikrostrukturierung von fotoschablonen mittels nichtreaktiver hochfrequenzionenätzung

1982 · B. Spangenberg, B.G. Goranchev, et al. · Thin Solid Films · 2

Berechnung des schichtwiderstandes für die borimplantation in silizium

1980 · B. Spangenberg, G.M. Mladenov, et al. · Thin Solid Films · 2

D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks II: Relation between the structure of the films and their mechanical and chemical properties

1980 · V. Orlinov, B. Goranchev, et al. · Thin Solid Films · 2

Striking and Running Voltages in a Glow Discharge for Combinations Fe/Ne with and without Hg

1973 · P. Pech, J. Kourtev, et al. · Beiträge aus der Plasmaphysik · 2

Works count: 38

Citation count: 410

H-index: 11

I10-index: 12