Work

Deposition of carbon films by bias magnetron sputtering in neon and argon

Year: 1990

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(90)90089-v

Authors: I. Petrov, I. Ivanov, V. Orlinov, J. Kourtev, J. Jelev

Institutions: Bulgarian Academy of Sciences, Institute of Electronics

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2091762452

FWCI:

Cites: 17

Cited by: 13

Related to: 10