Diffuse x-ray scattering from misfit dislocations in SiGe epitaxial layers with graded Ge content
Year: 1995
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.359728
Authors: V. Holý, J. H. Li, G. Bauer, F. Schäffler, H.-J. Herzog
Institutions: Johannes Kepler University of Linz, Daimler (Germany)
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2072011875