Work

Effects of laser bandwidth on tool to tool CD matching

Year: 2008

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.773567

Authors: Bo-Yun Hsueh, Hung-Yi Wu, Louis Jang, Met Yeh, Chen-Chin Yang, George KC Huang, Chun-Chi Yu, Allen Chang

Institution: United Microelectronics (Taiwan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Cymer

OpenAlex ID: W2076358675

FWCI:

Cites: 6

Cited by: 1

Related to: 10