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Bo Yun Hsueh
Observed name:
Bo-Yun Hsueh
Institution:
United Microelectronics (Taiwan)
Observed institution:
United Microelectronics (Taiwan)
OpenAlex ID:
A5049048632
High order correction and sampling strategy for 45nm immersion lithography overlay control
2008
·
Bo Yun Hsueh
, George K. C. Huang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
13
Sampling strategy: optimization and correction for high-order overlay control for 45nm process node
2009
·
Bo Yun Hsueh
, George K. C. Huang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Effects of laser bandwidth on tool to tool CD matching
2008
·
Bo-Yun Hsueh
, Hung-Yi Wu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
Feasibility study of splitting pitch technology on 45nm contact patterning with 0.93 NA
2007
·
Yung Feng Cheng
, Yueh Lin Chou
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
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Works count:
4
Citation count:
17
H-index:
2
I10-index:
1
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