Work

Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering

Year: 2007

Type: article

Source: Microelectronics Reliability

DOI: 10.1016/j.microrel.2007.08.010

Authors: Ping-Feng Yang, Hua-Chiang Wen, Sheng-Rui Jian, Yi-Shao Lai, Sean Wu, Rong-Sheng Chen

Institutions: Advanced Semiconductor Engineering (Taiwan), National Cheng Kung University, National Yang Ming Chiao Tung University, I-Shou University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2076536293

FWCI: 3.361

Cites: 37

Cited by: 67

Related to: 10