Overlay improvement methods with diffraction based overlay and integrated metrology
Year: 2015
Type: conference-paper
DOI: 10.1117/12.2087196
Authors: Young-Sun Nam, Sunny Kim, Ju Hee Shin, Young Sin Choi, Sang Ho Yun, Young Hoon Kim, Si Woo Shin, Jeong Heung Kong, Young Seog Kang, Hun Hwan Ha
Institution: Samsung Electronics (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Samsung
OpenAlex ID: W2083789809