Work

Experimental and Numerical Studies of the Response of Photomask Hard Pellicles to Acoustic Excitation

Year: 2002

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.468606

Authors: Eric P. Cotte, Phillip L. Reu, Roxann L. Engelstad, Edward G. Lovell, Andrew Grenville, Chris K. Van Peski

Institution: University of Wisconsin–Madison

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2084422697

FWCI: 1.126

Cites:

Cited by: 4

Related to: 10