Work

Laser reactive ablation deposition of silicon-nitride films

Year: 1995

Type: article

Source: Applied Physics A

DOI: 10.1007/bf01538403

Authors: M. L. Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, G. Majni, P. Mengucci, J. Zemek, I. N. Mihailescu

Institutions: University of Salento, Czech Academy of Sciences, FZU - Institute of Physics of the Czech Academy of Sciences, Institutul de Fizică Atomică

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2090737720

FWCI: 8.132

Cites: 18

Cited by: 34

Related to: 10