Real-time acoustic sensing and control of metalorganic chemical vapor deposition precursor concentrations delivered from solid phase sources
Year: 2004
Type: article
DOI: 10.1116/1.1776180
Authors: L. Henn-Lecordier, J. N. Kidder, G. W. Rubloff
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2094842827