Work

Electron beam and ion beam fabricated microwave switch

Year: 1970

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/t-ed.1970.17007

Authors: E.D. Wolf, L.O. Bauer, R.W. Bower, H.L. Garvin, C.R. Buckey

Institutions: HRL Laboratories (United States), Hughes Aircraft (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2103366471

FWCI: 3

Cites: 9

Cited by: 15

Related to: 10