Work

Interfacial reactions of titanium thin films on ion implanted (001) Si

Year: 1993

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(93)95030-9

Authors: H.R. Liauh, M.C. Chen, J.F. Chen, L.J. Chen, W. Lur, C.H. Chu

Institutions: National Yang Ming Chiao Tung University, National Tsing Hua University, United Microelectronics (Taiwan)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2103714747

FWCI:

Cites: 7

Cited by: 6

Related to: 10