Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms
Year: 1994
Type: article
Source: Sensors and Actuators A Physical
Authors: Rob Legtenberg, Harrie A.C. Tilmans, Job Elders, Miko Elwenspoek
Institution: University of Twente
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2104765787