Work

Novel dual layer floating gate structure as enabler of fully planar flash memory

Year: 2010

Type: conference-paper

Source: Symposium on VLSI Technology

DOI: 10.1109/vlsit.2010.5556198

Authors: Pieter Blomme, Maarten Rosmeulen, Antonio Cacciato, Maarten Kostermans, Christa Vrancken, Steven Van Aerde, Tom Schram, Ingrid Debusschere, Malgorzata Jurczak, Jan Van Houdt

Institutions: IMEC, ASM International (Belgium)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2124508258

FWCI: 2.562

Cites: 3

Cited by: 14

Related to: 10