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Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor

Year: 2006

Type: conference-paper

Source: Custom Integrated Circuits Conference

DOI: 10.1109/cicc.2006.320987

Authors: Y. Yamagata, H. Shirai, H. Sugimura, S. Arai, T. Wake, K. Inoue, T. Sakoh, M. Sakao, T. Tanigawa

Institution: NEC (Japan)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2128240481

FWCI: 0.528

Cites:

Cited by: 6

Related to: 10