Work

Improved thermally stable surface and bulk passivation of PECVD SiN/sub x/:H using N/sub 2/ and SiH/sub 4/

Year: 2003

Type: other

Source: TU/e Research Portal

Authors: A.W. Weeber, H.C. Rieffe, M.J.A.A. Goris, Joonhwa Hong, W.M.M. Kessels, M. C. M. van de Sanden, W.J. Soppe

Institution: Energy Research Centre of the Netherlands

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W2129015165

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