Work

Evaluation of Transistor Property Variations Within Chips on 300-mm Wafers Using a New MOSFET Array Test Structure

Year: 2004

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2004.831937

Authors: N. Izumi, H. Ozaki, Y. Nakagawa, N. Kasai, T. Arikado

Institution: Semiconductor Leading Edge Technologies, Inc (Japan)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2129017435

FWCI: 0.95

Cites: 11

Cited by: 36

Related to: 10