Thin film processing by biased target ion beam deposition
Year: 2000
Type: article
Source: IEEE Transactions on Magnetics
DOI: 10.1109/20.908643
Authors: T.L. Hylton, B. Ciorneiu, D.A. Baldwin, O. Escorcia, J. Son, M.T. McClure, G. Waters
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2133076232