Work

Advanced Anodic Bonding Processes For MEMS Applications

Year: 2003

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-782-a5.80

Authors: V. Dragoi, P. Lindner, T. Glinsner, M. Wimplinger, S. Farrens

Institution: EV Group (Austria)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2136163592

FWCI:

Cites: 6

Cited by: 5

Related to: 10