Characterization of Oxide Precipitates in Heavily B-Doped Silicon by Infrared Spectroscopy
Year: 2004
Type: article
DOI: 10.1149/1.1776592
Authors: O. De Gryse, P. Clauws, J. Vanhellemont, O. I. Lebedev, J. Van Landuyt, E. Simoen, C. Claeys
Institutions: Ghent University, University of Antwerp, IMEC, KU Leuven
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2140080751