Fabrication of microsensor and microactuator elements by the LIGA-process
Year: 2002
Type: conference-paper
Authors: J. Mohr, P. Bley, C. Burbaum, W. Menz, U. Wallrabe
Institution: Karlsruhe Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2141761895