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C. Burbaum
Observed names:
Burbaum, C.,
C Burbaum
Institution:
Karlsruhe Institute of Technology
Observed institution:
Karlsruhe Institute of Technology
OpenAlex ID:
A5034819035
Fabrication of capacitive acceleration sensors by the LIGA technique
1991
·
C. Burbaum
, J. Mohr
, et al.
·
Sensors and Actuators A Physical
·
81
Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems
1990
·
J. Mohr
, C. Burbaum
, et al.
·
Springer eBooks
·
55
LIGA-based flexible microstructures for fiber-chip coupling
1991
·
A Rogner
, W Ehrfeld
, et al.
·
Journal of Micromechanics and Microengineering
·
20
PDF
Fabrication of microsensor and microactuator elements by the LIGA-process
2002
·
J. Mohr
, P. Bley
, et al.
·
International Conference on Solid-State Sensors, Actuators and Microsystems
·
17
Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik
1991
·
Burbaum, C.
, Mohr, J.
·
Repository KITopen (Karlsruhe Institute of Technology)
·
2
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Works count:
5
Citation count:
175
H-index:
4
I10-index:
4
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