Work

Fabrication of capacitive acceleration sensors by the LIGA technique

Year: 1991

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/0924-4247(91)87051-4

Authors: C. Burbaum, J. Mohr, P. Bley, W. Ehrfeld

Institution: STEAG (Germany)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2024914134

FWCI: 6.273

Cites: 8

Cited by: 81

Related to: 10