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Progress in deep-etch synchrotron radiation lithography

1988 · W. Ehrfeld, P. Bley, et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 56

Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers

2004 · V. Nazmov, E. Reznikova, et al. · Microsystem Technologies · 55

Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems

1990 · J. Mohr, C. Burbaum, et al. · Springer eBooks · 55

Influence of developer temperature and resist material on the structure quality in deep x-ray lithography

1998 · F. J. Pantenburg, S. Achenbach, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 52

Deep photo-lithography characterization of SU-8 resist layers

2005 · E. F. Reznikova, J. Mohr, et al. · Microsystem Technologies · 48

Influence of secondary effects on the structure quality in deep X-ray lithography

1995 · F.J. Pantenburg, J. Mohr · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 45

Depiction of pneumothoraces in a large animal model using x-ray dark-field radiography

2018 · Katharina Hellbach, Andrea Baehr, et al. · Scientific Reports · 44

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Molding of three dimensional microstructures by the LIGA process

1992 · M. Harmening, W. Bacher, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 43

Freeform three-dimensional embedded polymer waveguides enabled by external-diffusion assisted two-photon lithography

2016 · Ho Hoai Duc Nguyen, Uwe Hollenbach, et al. · Applied Optics · 35

Theoretical and experimental results of an electrostatic micro motor with large gear ratio fabricated by the LIGA process

1992 · U. Wallrabe, P. Bley, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 33

Non-binary phase gratings for x-ray imaging with a compact Talbot interferometer

2014 · Andre Yaroshenko, Martin Bech, et al. · Optics Express · 32

Characterization of micro-optical components fabricated by deep-etch x-ray lithography

1991 · Jost Goettert, Juergen Mohr · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 31

X-ray lithography for devices with high aspect ratio polymer submicron structures

2007 · Timo Mappes, Sven Achenbach, et al. · Microelectronic Engineering · 30

Works count: 151

Citation count: 2,671

H-index: 28

I10-index: 68