Work

Movable Microstructures Manufactured by the LIGA Process as Basic Elements for Microsystems

Year: 1990

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-3-642-45678-7_74

Authors: J. Mohr, C. Burbaum, P. Bley, W. Menz, U. Wallrabe

Institution: Karlsruhe Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2268017752

FWCI: 20.15

Cites: 7

Cited by: 55

Related to: 10