Direct measurement of the nitrogen content by XPS in self‐passivated TaN x thin films
Year: 2008
Type: article
Source: Surface and Interface Analysis
DOI: 10.1002/sia.2919
Authors: Patrice Lamour, Philippe Fioux, Arnaud Ponche, Michel Nardin, Marie‐France Vallat, Pierre Dugay, Jean‐Paul Brun, Nathanaël Moreaud, Jean‐Marc Pinvidic
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2146337442