Work

Novel Effa-Based Thin-Film RF-MEMS Technology

Year: 2007

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2007.4300092

Authors: X. Rottenberg, P. Ekkels, S. Brebels, T. Webers, P. Czarnecki, R. P. Mertens, B. Nauwelaers, R. Puers, L. Marchand, I. De Wolf, W. De Raedt, H. A. C. Tilmans

Institutions: IMEC, KU Leuven, European Space Research and Technology Centre

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2149406263

FWCI:

Cites: 9

Cited by: 1

Related to: 10