Work

SIMS input lens

Year: 1993

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.155695

Authors: Robert L. Gerlach, Michael R. Scheinfein, Geoffrey A. Crow, Mark Utlaut, Charles Bickford

Institutions: Arizona State University, Intel (United States), University of Portland

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2149574308

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