A 400GHz fMAX fully self-aligned SiGe:C HBT architecture
Year: 2009
Type: conference-paper
Abstract: An improved fully self-aligned SiGe:C HBT architecture featuring a single-step epitaxial collector-base process is described. An fMAXvalue of 400 GHz is reached by structural as well as intrinsic advancements made to the HBT device.
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2156263265
