Work

SOI pressure sensor

Year: 2002

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.1991.148832

Authors: P.J. French, H. Muro, T. Shinohara, H. Nojiri, H. Kaneko

Institutions: Nissan (Japan), Delft University of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2156410596

FWCI:

Cites: 3

Cited by: 3

Related to: 10