Process Stabilization and Sensitivity Analyses of a Single Recess GaAs pHEMT Process using Device Simulations
Year: 2008
Type: conference-paper
Authors: Peter Abele, Michael Schafer, Jorg Splettstosser, Martin Thinnes, Hermann Stieglauer, Dag Behammer
Institution: United Monolithic Semiconductors (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2156449752
