A New Junction Termination Method Employing Shallow Trenches Filled With Oxide
Year: 2004
Type: article
Source: IEEE Electron Device Letters
Authors: J.-K. Oh, M.-W. Ha, M.-K. Han, Y.-I. Choi
Institutions: Seoul National University, Ajou University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2170549941
