Work

Diffusion Engineering by Carbon in Silicon

Year: 2000

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-610-b7.11

Authors: Ulrich Goesele, Pierre Laveant, Rene Scholz, Norbert Engler, Peter Werner

Institution: Max Planck Institute of Microstructure Physics

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2171652136

FWCI: 2.113

Cites: 42

Cited by: 38

Related to: 10