EUVA’s challenges toward 0.1nm accuracy in EUV at-wavelength interferometry
Year: 2006
Type: book-chapter
Source: Springer eBooks
Authors: Katsumi Sugisaki, Masanobu Hasegawa, Masashi Okada, Zhu Yucong, Katsura Otaki, Zhiqiang Liu, Mikihiko Ishii, Jun Kawakami, Katsuhiko Murakami, Jun Saito, Seima Kato, Chidane Ouchi, Akinori Ohkubo, Yoshiyuki Sekine, Takayuki Hasegawa, Akiyoshi Suzuki, Masahito Niibe, Mitsuo Takeda
Institutions: University of Hyogo, University of Electro-Communications
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2175127359