Imaging SIMS at 20 nm Lateral Resolution: Exploratory Research Applications
Year: 1986
Type: book-chapter
Authors: R. Levi-Setti, G. Crow, Y. L. Wang
Institution: University of Chicago
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2287201006
