CoSi and CoSi2 Phase Formation on Bulk and Soi Si Substrates
Year: 1993
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-320-373
Authors: S. L. Hsia, T. Y. Tan, P. L. Smith, G. E. Mcguire
Institutions: Duke University, MCNC Research and Development Institute
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2320006629