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A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers

Year: 2016

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2219312

Authors: S. Böhme, C. Girardot, J. Garnier, J. Arias-Zapata, S. Arnaud, R. Tiron, O. Marconot, D. Buttard, M. Zelsmann

Institutions: Centre National de la Recherche Scientifique, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information, Université Grenoble Alpes, CEA Grenoble

Language: English

Topic: Block Copolymer Self-Assembly

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Agence Nationale de la Recherche

OpenAlex ID: W2322201660

FWCI: 1.483

Cites: 25

Cited by: 3

Related to: 10