Author

Sophie Böhme

Observed names: Bohme Sophie, S. Böhme, Sophie BöHME

Institutions: Centre National de la Recherche Scientifique, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, Université Grenoble Alpes

Observed institutions: Centre National de la Recherche Scientifique, Université Joseph Fourier, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Energy Research Centre of the Netherlands, CEA Grenoble, Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information, Communauté Université Grenoble Alpes, Université Grenoble Alpes

OpenAlex ID: A5103403147

Pulsed Transfer Etching of PS–PDMS Block Copolymers Self-Assembled in 193 nm Lithography Stacks

2014 · Cécile Girardot, Sophie Böhme, et al. · ACS Applied Materials & Interfaces · 47

Ultrafast Assembly of PS‐PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers

2016 · Javier Arias‐Zapata, Sophie Böhme, et al. · Advanced Functional Materials · 33

Sub-10 nm Silicon Nanopillar Fabrication Using Fast and Brushless Thermal Assembly of PS-b-PDMS Diblock Copolymer

2016 · Jérôme Garnier, Javier Arias-Zapata, et al. · ACS Applied Materials & Interfaces · 22

High throughput sub-10nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint

2015 · Javier Arias-Zapata, Julien Cordeiro, et al. · Microelectronic Engineering · 7

Directed self-assembly of PS-b-PDMS into 193nm photoresist patterns and transfer into silicon by plasma etching

2014 · Sophie Archambault, Cécile Girardot, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5

Graphene structuration by self-assembly of high-χ block copolymers

2017 · J. Arias-Zapata, D. Ferrah, et al. · Materials Today Proceedings · 4

A route for industry compatible directed self-assembly of high-chi PS-PDMS block copolymers

2016 · S. Böhme, C. Girardot, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3

Annealing treatments of cylindrical siloxane-based block copolymers optimized for nanomanufacturing

2018 · Sophie Böhme, Javier Arias-Zapata, et al. · Micro and Nano Engineering · 2

Fabrication and characterisation of polymer based solar cells

2008 · L. H. Slooff, S. Böhme, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Towards high-chi block copolymers at the industry scale : routes for a possible integration as a new nanostructuring technology

2016 · Sophie BöHME · theses.fr (ABES)

可塑剤とのブレンドによる300mmウエハ上のPS‐PDMSブロック共重合体の超高速集合【Powered by NICT】

2016 · Arias-Zapata Javier, Bohme Sophie, et al. · Advanced Functional Materials

Works count: 11

Citation count: 124

H-index: 5

I10-index: 3