Changes in surface condition and time to clear vision on ITO thin film by electron beam irradiation.
Year: 2000
Type: article
Abstract: ITO thin films are useful materials for electric devices, where wettability of the ITO thin film is one of dominant factors of adherent and durability. Because electron beam irradiation decreases the contact angle of materials, we studied influence of electoron beam irradiation on surface condition of ITO thin film. From the results of contact angle measurement, x-ray photoelectron spectra and force-distance curve before and after electron beam irradiation on thin ITO films, we found that the surface energy was increased by the irradiation.
Source: Journal of Advanced Science
DOI: 10.2978/jsas.12.42
Authors: Rie FUJII, Yoshitake NISHI, Kazuya OGURI
Institution: Tokai University
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W2322639082