Work

Surface chemistry and fundamental limitations on the plasma cleaning of metals

Year: 2016

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2016.05.082

Authors: Bin Dong, M. Sky Driver, Ismail Emesh, Roey Shaviv, Jeffry A. Kelber

Institutions: University of North Texas, Applied Materials (United States)

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Applied Materials, University of North Texas

OpenAlex ID: W2398980906

FWCI: 0.514

Cites: 21

Cited by: 14

Related to: 10